Blue and Green Cathodoluminescence of Synthesized Diamond Films Formed by Plasma-Assisted Chemical Vapour Deposition

• Kawarada Hiroshi

  Faculty of Engineering, Osaka University

• Nishimura Kazuhito

  Osaka Diamond Industrial Co.

• Ito Toshimichi

  Planning and Development Center, Idemitsu Petrochemical Co. Ltd.

• Suzuki Jun-ichi

  Faculty of Engineering, Osaka University

• Mar King-Sheng

  Faculty of Engineering, Osaka University

• Yokota Yoshihiro

  Faculty of Engineering, Osaka University

• Hiraki Akio

  Faculty of Engineering, Osaka University

抄録

Cathodoluminescence study of synthesized diamond films formed by magneto-microwave plasma CVD and usual microwave plasma CVD has been carried out for the first time. The visible luminescence spectra of these diamond films show that peaks occur at different energies between 2.4–2.8 eV (green to purple-blue by visual inspection), depending on the deposition conditions. These spectra can be classified into so-called "band A" luminescence commonly observed in all types of bulk diamond. The growth sectors of {100} (bright visible emission) and {111} (dark) can be differentiated by the intensity of luminescence. These features are analogous to the luminescent properties of high-pressure synthesized diamond.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 27 (4), L683-L686, 1988

  公益社団法人 応用物理学会

キーワード

• cathodoluminescence
• diamond film
• plasma CVD

詳細情報

• CRID: 1573668927890503168
• NII論文ID: 130003468231
• ISSN: 00214922
• Web Site: https://jlc.jst.go.jp/DN/JALC/00337520059?from=CiNii
• 本文言語コード: en
• データソース種別:
  • CiNii Articles