Measurement of Extreme-High-Vacuum Pressure by Laser Ionization

• Kokubun Kiyohide

  Electrotechnical Laboratory

• Ichimura Shingo

  Electrotechnical Laboratory

• Sekine Shigeyuki

  Electrotechnical Laboratory

• Shimizu Hazime

  Electrotechnical Laboratory

抄録

Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, extreme-high-vacuum (XHV) pressure to 7×10⁻¹⁰ Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (8), L1109-L1111, 1993

  公益社団法人 応用物理学会

キーワード

• laser ionization
• XHV
• pressure measurement
• H<SUB>2</SUB>

詳細情報

• CRID: 1574231877910952832
• NII論文ID: 130003474170
• ISSN: 00214922
• Web Site: https://jlc.jst.go.jp/DN/JALC/00337595965?from=CiNii
• 本文言語コード: en
• データソース種別:
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