位置検出機能を内蔵した超小型慣性駆動アクチュエータ

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タイトル別名
  • Micro Inertial Driving Actuator with Built-in Position Sensor
  • イチ ケンシュツ キノウ オ ナイゾウ シタ チョウコガタ カンセイ クドウ アクチュエータ

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The micro inertial drive actuator, which can move two sliders independently, at 2.5 mm in width, 2 mm in height, and 20 mm in length was made as an experiment, and the basic characteristic was evaluated. As a result, we confirmed the movement speed of about 35 mm/s (drive frequency of 16 kHz) in the applied voltage of 80 V. In addition, we indicated that the position detection of the slider by a built-in sensor was possible, and achieved the position accuracy of ± 20 µm by using the control system with the build-in sensor.

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