Enhancement of Excited Secondary Fe Atoms under Oxygen Ion Bombardment

• Kubota Naoyoshi

  Advanced Technology Research Laboratories, Nippon Steel Corporation, Japan

• Hayashi Shun-ichi

  Advanced Technology Research Laboratories, Nippon Steel Corporation, Japan

抄録

Resonance enhanced multiphoton ionization (REMPI) spectra of sputtered Fe atoms for three kinds of sample matrices have been measured to confirm the matrix effects for SNMS using Ar⁺ and O₂⁺ beams. It is shown that the intensity of Fe-56 atoms sputtered in higher energy state, that is the ground state multiplets and the first excited state, increases with increasing surface oxygen concentration in the spectra. Depth profile measurements of Fe-54 implanted in SIMOX have been also performed for three kinds of (1+1) schemes by REMPI-SNMS. The depth profile for Fe-54 sputtered in the ground state has corresponded to the SRIM2003 calculation result. On the other hand, the intensity of Fe-54 sputtered in the first excited state has been enhanced in the SiO₂ layer. By a comparison with the result of the REMPI spectrum measurement, this enhancement may be influenced by not only the surface oxygen concentration but also matrix elements in samples. [DOI: 10.1380/ejssnt.2009.191]

収録刊行物

• e-Journal of Surface Science and Nanotechnology

  e-Journal of Surface Science and Nanotechnology 7 191-194, 2009

  公益社団法人 日本表面真空学会

キーワード

• Ion bombardment
• Laser methods
• Secondary ion mass spectroscopy
• Atom emission
• Ion-solid interactions
• Steel
• Silicon oxides

詳細情報

• CRID: 1390282680161776640
• NII論文ID: 130004439138
• DOI: 10.1380/ejssnt.2009.191
• ISSN: 13480391
• Web Site: http://www.jstage.jst.go.jp/article/ejssnt/7/0/7_0_191/_pdf
• 本文言語コード: en
• データソース種別:
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  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可