3kHz XeCl Excimer Laser Using New Type of Electrode.

• Ishii Akira

  Toshiba Corporation, Kawasaki 210, Japan

• Yasuoka Koichi

  Toshiba Corporation, Kawasaki 210, Japan

• Okita Yuji

  Toshiba Corporation, Kawasaki 210, Japan

• Tamagawa Tohru

  Toshiba Corporation, Kawasaki 210, Japan

抄録

A new type of electrode for XeCl excimer lasers has been developed. In order to produce a stable discharge at a high repetition rate, we calculated the electric field strength distribution of the discharge area, using the finite-element method. On the basis of the calculation results, we fabricated a new type of electrode, applied it to an XeCl excimer laser, and operated the laser at a repetition rate of 3 kHz. The laser power during 3 kHz operation was 18.9 W with the Ernst-type electrode and 24.4 W with the new-type electrode. The space distribution of density variance due to gas expansion in the discharge area could be checked by the laser schlieren method. With the Ernst-type electrode, the energy is concentrated in the center of the discharge area. With the new-type electrode, in contrast, the energy concentration is reduced, making the discharge stable.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 34 (5A), 2324-2328, 1995

  The Japan Society of Applied Physics

キーワード

• excimer laser
• high-repetition laser
• electric field
• shape of electrodes
• uniform discharge

詳細情報

• CRID: 1390282681222721664
• NII論文ID: 210000037278
• NII論文ID: 130004521330
• DOI: 10.1143/jjap.34.2324
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.34.2324
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.34.2324/pdf
• 本文言語コード: en
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