Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism

• Kawai Yusuke

  Graduate School of Engineering, Tohoku University

• Kotani Kyosuke

  Graduate School of Engineering, Tohoku University

• Shao Chuan-Yu

  Graduate School of Engineering, Tohoku University

• Ono Takahito

  Graduate School of Engineering, Tohoku University

抄録

A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actuator. Microsprings formed by deep reactive-ion etching are used for the clip micromechanism. Cantilever-shaped microelements for the TOF-SFM are handled by a manipulator, and the microgap between the microspring and opposite wall is expanded by pulling the microspring using a microneedle. Then, the microelement is inserted into the micromechanism, and is clipped by releasing the microspring. After assembly, all microelements are fixed with a conductive glue. Electrostatic actuation of the cantilevered microelement is demonstrated. This technique is advantageous in the fabrication of complex three-dimensional microstructures.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 135 (3), 98-102, 2015

  一般社団法人 電気学会

キーワード

• Micro-assembly
• Scanning force microscopy
• Electrostatic actuator
• Micromechanism

詳細情報

• CRID: 1390282679437456256
• NII論文ID: 130004849078
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.135.98
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 026246561
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026246561
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_98/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
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