THE MEASUREMENT FOR THICKNESS OF MAGNETIC THIN FILM DURING VACUUM DEPOSITION

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  The X-ray fluorescence method was applied to determine the magnetic thickness of single, double and triple-layerd Co-Ni-O on PET substrate. Am-241 X-ray source of 35mCi was used for exciting fluorescent X-ray. Si(Li) semiconductor detector and proportional counter were used for X-ray fluorescence detection, and found out the applicability for magnetic thickness monitoring with stable electron-beam irradiated vapor source, respectively. The optical method to detect light through Co-Ni-O and PET films was examined as another nondestructive monitoring method. Partially oxidized Co-Ni were sufficiently transparent to detect the magnetic thickness up to 1000[G u]by using ordinary optical method. These investigations show that both monitoring methods are useful for fabrication of ME tape with Co-Ni-O thin films for existing and future video recording.

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