Synthesis of Magnetic Nanoparticles in Pulsed Radio Frequency Plasma CVD

• Matsui Isao

  Japan Chemical Innovation Institute, Japan Toshiba research and development center, Japan

抄録

Transient charging on particle was estimated by solving orbital motion limit model equation, where ion and electron fluxes were calculated by considering the particle surface electric field. Using equilibrium charge on particle, particle trajectory in capacitive glow discharge was estimated by solving motion equation, which considered external forces as fluid drag force, gravitational force, electrostatic force and ion drag force. Glow discharge was calculated by continuous model, which considers continuity and flux equations for electron and ion. Calculation results showed quantitative effect of plasma structure induced from various plasma input condition, such as power input, pressure and gas properties on the characteristic motion of particle in glow discharge plasma space. We attempted to synthesize Fe and Pt containing alloy nanoparticles using the above phenomena. The plasma was modulated with a square-wave on/off cycle of varying period to study the growth kinetics. The synthesized particles were directly collected onto TEM sample grid placed in the plasma electrode. TEM pictures showed two kinds of particles, one of which is nanometer size and isolated and the other appeared a coagulate of nanometer size particles. The size of particle coagulates was controlled in the 10-100 nm range by adjusting the plasma-on time. The size distribution of the particle coagulates collected through the skimmer was as small as 5%. The alloy particles magnetization was measured by VSM(Vibrating Sample Magnetometer). As-synthesized particles showed no magnetization, though the composition was precisely adjusted to Fe50Pt50. Heat treatment in hydrogen atmosphere results in the magnetization. FePt annealed over 650 °C showed large magnetization.

収録刊行物

• アジア・太平洋化学工学会議発表論文要旨集

  アジア・太平洋化学工学会議発表論文要旨集 2004 (0), 115-115, 2004

  公益社団法人 化学工学会

キーワード

• nanoparticle
• CVD
• plasma
• magnetization

詳細情報

• CRID: 1390282680706593664
• NII論文ID: 130005052127
• DOI: 10.11491/apcche.2004.0.115.0
• 本文言語コード: en
• データソース種別:
  • JaLC
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可