Systematic Theoretical Investigations on Surface Reconstruction and Adatom Kinetics on AlN Semipolar Surfaces

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The surface reconstructions and adatom kinetics on AlN(1-102) and AlN(1-101) surfaces in the presence of H2 molecules are investigated on the basis of density-functional theory calculations. Our surface phase diagram calculations demonstrate that the H-incorporated surfaces are invariably stable over the wide range of H2 pressure. We find that under the growth condition the adsorption energy of Al adatom on AlN(1-102) surface is much larger than that on AlN(1-101) surface. Furthermore, we find that the diffusion behavior of Al adatom on AlN(1-101) surface is significantly influenced by the presence of hydrogen. These results suggest that impact of hydrogen ambient during the metal-organic vapor-phase epitaxy growth on AlN(1-102) surface is quite different from that on AlN(1-101) surface. [DOI: 10.1380/ejssnt.2015.239]

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詳細情報

  • CRID
    1390001205187409280
  • NII論文ID
    130005071334
  • DOI
    10.1380/ejssnt.2015.239
  • ISSN
    13480391
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • Crossref
    • CiNii Articles
    • KAKEN
  • 抄録ライセンスフラグ
    使用不可

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