Systematic Theoretical Investigations on Surface Reconstruction and Adatom Kinetics on AlN Semipolar Surfaces
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- Takemoto Yoshitaka
- Department of Physics Engineering, Mie University
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- Akiyama Toru
- Department of Physics Engineering, Mie University
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- Nakamura Kohji
- Department of Physics Engineering, Mie University
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- Ito Tomonori
- Department of Physics Engineering, Mie University
抄録
The surface reconstructions and adatom kinetics on AlN(1-102) and AlN(1-101) surfaces in the presence of H2 molecules are investigated on the basis of density-functional theory calculations. Our surface phase diagram calculations demonstrate that the H-incorporated surfaces are invariably stable over the wide range of H2 pressure. We find that under the growth condition the adsorption energy of Al adatom on AlN(1-102) surface is much larger than that on AlN(1-101) surface. Furthermore, we find that the diffusion behavior of Al adatom on AlN(1-101) surface is significantly influenced by the presence of hydrogen. These results suggest that impact of hydrogen ambient during the metal-organic vapor-phase epitaxy growth on AlN(1-102) surface is quite different from that on AlN(1-101) surface. [DOI: 10.1380/ejssnt.2015.239]
収録刊行物
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- e-Journal of Surface Science and Nanotechnology
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e-Journal of Surface Science and Nanotechnology 13 (0), 239-243, 2015
公益社団法人 日本表面真空学会
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詳細情報
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- CRID
- 1390001205187409280
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- NII論文ID
- 130005071334
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- ISSN
- 13480391
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可