Growth of ZnO films on glass substrates by chemical bath deposition

  • Abe Koji
    Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology
  • Matsumoto Takuya
    Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology

抄録

Continuous zinc oxide (ZnO) films were formed on glass substrates by using a two-step method, including seed layer formation by dip-coating and subsequent growth by chemical bath deposition (CBD). The rod-like ZnO particles, which were used as a seed layer, were deposited by dipping the substrates into a tetraamine zinc solution. After the seed layer formation, ZnO was grown by CBD. Larger rod-like ZnO particles were synthesized from the base aqueous solution prepared by mixing ZnO, nitric acid, aqueous ammonia, and deionized water. Trisodium citrate and sodium chloride, which were added to the base aqueous solution, influenced surface morphologies and structural properties of ZnO. When trisodium citrate was used, the morphologies changed from rod-like ZnO particles to continuous ZnO films. However, the intensity of the ZnO (002) diffraction peak decreased with increasing trisodium citrate concentration. Continuous ZnO films with a preferred c-axis orientation were obtained from the aqueous solution containing both trisodium citrate and sodium chloride.

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詳細情報

  • CRID
    1390282680490809984
  • NII論文ID
    130005089541
  • DOI
    10.14723/tmrsj.40.183
  • ISSN
    21881650
    13823469
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • Crossref
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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