測定学から見た真空計測の基礎 (4)　真空計の長期安定性

• 吉田 肇

  国立研究開発法人　産業技術総合研究所　工学計測標準研究部門

書誌事項

タイトル別名

• Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges
• ソクテイガク カラ ミタ シンクウ ケイソク ノ キソ(4)シンクウケイ ノ チョウキ アンテイセイ
• Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges

抄録

  This fourth lecture of “Basics of Vacuum measurement from viewpoint of Metrology” introduces the long-term stability of vacuum gauges, such as capacitance diaphragm gauges (CDGs), high accuracy pressure gauges, spinning rotor gauges (SRGs), ionization gauges (IGs), and quadrupole mass spectrometers (QMSs). The data includes results obtained by laboratory experiments, stability of transfer standards for international comparisons, and calibration experiences of customer gauges by both national metrology institutes and vacuum gauge manufacturers. It is important to understand general trends of their long-term stabilities for reliable vacuum pressure measurements.<br>

収録刊行物

• Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ

  Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ 58 (7), 265-271, 2015

  一般社団法人 日本真空学会

キーワード

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

詳細情報

• CRID: 1390001205295968256
• NII論文ID: 130005091233
• NII書誌ID: AA12298652
• DOI: 10.3131/jvsj2.58.265
• ISSN: 18824749
• ISSN: 18822398
• NDL書誌ID: 026611932
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026611932
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可