Saving Energy of Dry Vacuum Pump for Harsh Process

DOI Web Site
  • SUGIURA Tetsuro
    HD Components Group, Components Engineering Department, Components Division, Precision Machinery Company, EBARA Corporation

Bibliographic Information

Other Title
  • 中重負荷向けドライ真空ポンプの省エネルギー化
  • チュウ ジュウフカ ムケ ドライ シンクウ ポンプ ノ ショウエネルギーカ

Search this article

Abstract

  For dry vacuum pumps, typically used for chemical vapor deposition (CVD) and Etching process in semiconductor factory, the durability of byproduct deposition and /or corrosion is very important. And also energy saving is one of the key factor on this application for cost ownership stand point.<br>   Our ``Model EV-M'' dry pumps have achieved significant enhancement for saving energy consumption, and have incorporated various countermeasures against byproduct deposition and corrosion, like optimized internal temperature profile and material selection. With these, both significant saving energy and process durability can be achieved under the use of the harsh duty condition such as CVD and Etching process.<br> (Note: EV-M is Ebara's model code)<br>

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top