Degradation of Polymers for Resist Using Microbubbles on Ozonized Water

• Matsuura Kohei

  Graduate School of Engineering, Osaka City University

• Nishiyama Takashi

  Graduate School of Engineering, Osaka City University

• Sato Eriko

  Graduate School of Engineering, Osaka City University

• Yamamoto Masashi

  National Institute of Technology, Kagawa College, Kagawa

• Takahashi Masayoshi

  National Institute of Advanced Industrial Science and Technology

• Koike Kunihiko

  Iwatani Corporation

• Horibe Hideo

  Graduate School of Engineering, Osaka City University

抄録

A significant effect of microbubbles on degradation of novolak resin could not be confirmed. Microbubbles efficiently dissolved ozone in solution, enhancing dissolved ozone concentration. By using ozone microbubbles, removal rate of novolak resin was enhanced. We expect that the effect of polymer degradation by microbubbles would be made more obvious by setting suitable conditions such as pH, ionic strength, and removal process.

収録刊行物

• Journal of Photopolymer Science and Technology

  Journal of Photopolymer Science and Technology 28 (2), 299-301, 2015

  フォトポリマー学会

キーワード

• microbubble
• ozone
• photoresist
• removal
• environmental

詳細情報

• CRID: 1390001204326289920
• NII論文ID: 130005093862
• NII論文ID: 40020519533
• NII書誌ID: AA11576862
• DOI: 10.2494/photopolymer.28.299
• ISSN: 13496336
• ISSN: 09149244
• NDL書誌ID: 026578848
• Web Site: http://id.ndl.go.jp/bib/026578848
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026578848
• Web Site: https://www.jstage.jst.go.jp/article/photopolymer/28/2/28_299/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可