駆動電流を用いた圧電アクチュエータの発生力の推定

• 古谷 克司

  豊田工業大学

• 犬飼 亮太

  豊田工業大学大学院

• 徐 世傑

  メカノトランスフォーマ

• 矢野 健

  メカノトランスフォーマ

• 樋口 俊郎

  東京大学大学院

書誌事項

タイトル別名

• Estimation of Generative Force of Piezoelectric Actuator by Using Driving Current

抄録

This paper deals with a force estimation method by using driving current of a piezoelectric actuator. Because the size of sensors sometimes restricts the size of a whole device, a sensor-less control is preferable to build a device compactly. A mechanical clamp device including the actuator was represented as an equivalent electric circuit by applying Martin's model, and a force change is calculated from the driving current. Although only dynamic behavior generates the electric charge in the piezoelectric actuator, a static stress varies its piezoelectric constant. Then the stiffness of the piezoelectric actuator will change. The preload of the piezoelectric actuator can be estimated from the resonant frequency of residual vibration of the driving current, which coincided with the mechanical vibration of the device. Consequently, the generated force can be represented as a linear function of the applied voltage and resonance frequency of the current. The force containing the static preload was estimated with an error less than 12% for step response.

収録刊行物

• 精密工学会誌

  精密工学会誌 81 (9), 875-880, 2015

  公益社団法人 精密工学会

キーワード

• piezoelectric actuator
• equivalent circuit
• resonance frequency
• self-sensing
• generative force

詳細情報

• CRID: 1390282679805377280
• NII論文ID: 130005095856
• DOI: 10.2493/jjspe.81.875
• ISSN: 1882675X
• ISSN: 09120289
• Web Site: https://www.jstage.jst.go.jp/article/jjspe/81/9/81_875/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可