Terahertz Devices with Reconfigurable Metamaterials by Surface Micromachining Technique

• Han Zhengli

  Institute of Industrial Science, The University of Tokyo

• Kohno Kenta

  Institute of Industrial Science, The University of Tokyo

• Fujita Hiroyuki

  Institute of Industrial Science, The University of Tokyo

• Hirakawa Kazuhiko

  Institute of Industrial Science, The University of Tokyo

• Toshiyoshi Hiroshi

  Institute of Industrial Science, The University of Tokyo

抄録

We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 135 (11), 450-453, 2015

  一般社団法人 電気学会

キーワード

• Tunable THz Devices
• Reconfigurable Metamaterial
• Surface MEMS
• Electrostatic Actuation

詳細情報

• CRID: 1390282679439214208
• NII論文ID: 130005106180
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.135.450
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 026916258
• Web Site: http://id.ndl.go.jp/bib/026916258
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026916258
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/135/11/135_450/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可