Effects of substrate surface composition and deposition temperature on deposition of flat and continuous Ru thin films
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- CHIBA Hirokazu
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology TOSOH Corporation
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- HIRANO Masaki
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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- KAWANO Kazuhisa
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology TOSOH Corporation
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- OSHIMA Noriaki
- TOSOH Corporation
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- FUNAKUBO Hiroshi
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology
抄録
Ru thin films were deposited by pulsed metal organic chemical vapor deposition on SiO2 (native oxide)/(001)Si, HfSiON/SiON/(001)Si, and HfO2/SiON/(001)Si substrates at 200, 210, and 230°C from bis(2,4-dimethylpentadienyl)ruthenium [Ru(DMPD)2]–O2 system. Incubation time before starting the film deposition strongly depended on the deposition temperature. Atomic force microscopy (AFM) revealed that average surface roughness, Ra, of the Ru films deposited on HfO2/SiON/(001)Si substrates strongly depended on the deposition temperature even though those films deposited on SiO2 (native oxide)/(001)Si substrates and HfSiON/SiON/(001)Si substrates showed small dependency on deposition temperature. In addition, it was obvious that the grain size of Ru films deposited on HfO2/SiON/(001)Si substrate was larger than those deposited on SiO2 (native oxide)/(001)Si substrates. Minimum film thickness to obtain continuous Ru film was almost independent on the kinds of substrates and deposition temperature range from 200 to 230°C. These results clearly show the effect of kinds of substrates and deposition temperature on flat and continuous Ru film deposition.
収録刊行物
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 124 (6), 694-696, 2016
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390282680262019584
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- NII論文ID
- 130005155637
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- ISSN
- 13486535
- 18820743
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可