書誌事項
- タイトル別名
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- Electroplating Technology of Platinum Catalyst for MEMS Hydrogen Gas Sensor
- MEMS スイソ ガスセンサ ノ タメ ノ ハッキン ショクバイ ノ メッキ ギジュツ
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抄録
<p>In this paper, we discuss electroplating method to deposit platinum catalyst called platinum black on the both-side of sensors on a quartz wafer to improve sensitivity of hydrogen sensors using quartz resonators. By increasing current density until the limiting current density, the platinum black films were deposited on the electrodes of sensors in a stable. Under the constant current condition, controllability of film thickness of platinum black by time was confirmed. As a result of comparison to the sputtered platinum thin film catalyst, the platinum black catalyst showed higher catalytic activity.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 136 (12), 511-514, 2016
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460113920
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- NII論文ID
- 130005171120
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 027784819
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可