書誌事項
- タイトル別名
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- Fabrication of Bridged Glass Nanopillar Structure with High Scratch Resistance
- ハシカケ コウゾウ ニ ヨリ タカイ コスリ タイセイ オ ジツゲン スル ガラスナノピラー ノ サクセイ
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抄録
<p>In this study, we proposed bridged glass nanopillar structures with high scratch resistance. The glass nanopillars were joined each other with bridged structures. The bridged glass nanopillars were fabricated using anisotropic talbot photolithography and reactive ion etching. AFM and FE-SEM analyses showed that the bridged glass nanopillar structures were successfully fabricated by photolithography and dry etching. Scratch resistance of the bridged glass nanopillers improved seven times stronger than that of the nanopillers without bridged structures in friction test using a flannel cloth. Furthermore, bridged glass nanopillars were not collapsed through high stress friction test using a steel wool. Additionally, self-cleaning effect of the bridged glass nanopillars with superhydrophilic behavior were successfully demonstrated by spraying water droplets. We expect that the proposed bridged glass nanopillar structures will be a highly promising technology for self-cleaning glass.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 137 (3), 72-77, 2017
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460059008
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- NII論文ID
- 130005397999
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 028034732
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可