Deposition of DLC Films onto Oxynitriding-Treated V4E High Vanadium Tool Steel through DC-Pulsed PECVD Process

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  • Chang Shih-Hsien
    Department of Materials and Mineral Resources Engineering, National Taipei University of Technology
  • Wu Wei-Chen
    Department of Materials and Mineral Resources Engineering, National Taipei University of Technology
  • Huang Kuo-Tsung
    Department of Auto-Mechanics, National Kangshan Agricultural Industrial Senior High School
  • Liu Chung-Ming
    Department of Chemical and Material Engineering, Lunghwa University of Science and Technology

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<p>In this work, DLC films are prepared by DC-pulsed PECVD after the oxynitriding treatment of V4E high vanadium tool steel. The experimental design includes various power densities (200, 400, 600 and 800 mW·cm−2) with an unbalanced bipolar-pulsed voltage. The deposition time is 90 min, and the CH4 gas flow is maintained at 5 sccm, respectively. The experimental results show the duplex coating layers to have better properties when the DLC films are treated by an appropriate power density (400 mW·cm−2). These films also possess the lowest wear loss volume (for loads of 2 N and 5 N of 6.23 × 10−3 mm3 and 1.19 × 10−2 mm3, respectively), the lowest corrosion current (4.09 × 10−4 A·cm−2) and the highest polarization resistance (258.83 Ω·cm2) after the 3.5 mass% NaCl corrosion test. This study confirms that the wear and corrosion resistance of V4E tool steel can be effectively improved through the DLC/oxynitriding duplex treatment.</p>

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