書誌事項
- タイトル別名
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- PSF Estimation Technique for SEM Image Restoration
- SEM ガゾウ フクゲン ニ オケル レッカ カンスウ スイテイ ギジュツ
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<p>In the semiconductor device manufacturing there has been a pressing need for inspection and measurement by using high-resolution images of scanning electron microscopes (SEMs). The SEM spatial resolution is mainly determined by the beam spot size at the specimen's surface and the spreading of the beam electrons in the specimen. Image restoration sharpens an observed image by the process of removing blur, which is represented by a point spread function (PSF), from the image. In this paper we address the problem of identifying the parameter of the PSF, the so-called blind deconvolution problem. The proposed method estimates the parameter from both the Fourier spectrum of the observed image and the diameter of the electron beam calculated by electro-optics simulator. Extensive experiments on real image data indicate significant improvements in image quality compared with conventional methods. The estimation error of the PSF parameter by the proposed method was about half that of the conventional one.</p>
収録刊行物
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- 電気学会論文誌C(電子・情報・システム部門誌)
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電気学会論文誌C(電子・情報・システム部門誌) 137 (12), 1669-1675, 2017
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679586738432
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- NII論文ID
- 130006235424
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- NII書誌ID
- AN10065950
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- ISSN
- 13488155
- 03854221
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- NDL書誌ID
- 028725049
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可