One-shot laser processing based on LCOS technology

• Nishitateno Masasshi

  santec Corporation

• Hotta Yuji

  santec Corporation

• Otowa Ryohei

  santec Corporation

• Sakurai Yasuki

  santec Corporation

• Zheng Lihe

  Institute for Molecular Science

• Ymamamoto Hiroshi

  Institute for Molecular Science

• Taira Takunori

  Institute for Molecular Science

Bibliographic Information

Other Title

• LCOS-SLM を用いたワンショットレーザ微細加工装置

Abstract

Journal

• Proceedings of Japanese Liquid Crystal Society Annual meeting

  Proceedings of Japanese Liquid Crystal Society Annual meeting 2017 (0), S02-, 2017

  THE JAPANESE LIQUID CRYSTAL SOCIETY

Details

• CRID: 1390001288035881216
• NII Article ID: 130007384312
• DOI: 10.11538/ekitou.2017.0_s02
• ISSN: 24325988
• ISSN: 18803490
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles
• Abstract License Flag: Disallowed