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- 峯田 貴
- 山形大学
書誌事項
- タイトル別名
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- Batch fabrication of active catheter mechanism using thick-resist-cylindrical lithography and Ni electro-plating
抄録
<p>This paper presents a novel batch fabrication process of cylindrical skeleton structure with a helical flat-wire-coil spring and insulating parts for tubular shape memory alloy (SMA) active catheter. The fabrication processes based on UV laser lithography and Ni electro-plating on the cylindrical surface was examined on a dummy Cu core rod instead of a tubular SMA actuator. Both 20-μm-thick negative resist (SU-8) micro-structure and positive resist (OFPR-800LB) mold for electroplating were successfully lithographed by UV laser direct drawing with low temperature resist baking process (45℃, 12h). A Ni bias spring with helical flat-wire-coil shape was successfully electroplated in the thick resist mold pattern on a rotationally sputtered Cu seed layer. Mechanical attaching and electric connection parts were also batch fabricated through the fabrication processes.</p>
収録刊行物
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- 年次大会
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年次大会 2020 (0), J13113-, 2020
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390287462799060352
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- NII論文ID
- 130008003753
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- ISSN
- 24242667
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可