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Miniature ultrasonic probes were developed by hydrothermally depositing lead zirconate titanate (PZT) polycrystalline films on a titanium (Ti) wire. The small ultrasound probes were fabricated using hydrothermally deposited PZT polycrystalline film on the end of a titanium wire with a diameter of 0.6 mm and a length of 50 mm. The performances of the prototype small ultrasound probes were measured. As a result, it was confirmed that the probe has a center frequency of 16 MHz, a fractional bandwidth of 70%, and a distance resolution of better than about 130 μm without using an acoustic matching layer. It was also found that the beam width was 0.55 mm for a distance of 4 mm between the string target and the miniature ultrasound probe.
- Jpn J Appl Phys
Jpn J Appl Phys 46(7B), 4801-4804, 2007-07-30
INSTITUTE OF PURE AND APPLIED PHYSICS