%A Lee, Kong-Soo %A Yeo, Chadong %A Yoo, Dae-Han %A Kim, Seok-Sik %A Moon, Joo-Tae %A Jung, Soon-Moon %A Son, Yong-Hoon %A Park, Hyunho %A Jeong, Hanwook %A Kim, Kwang-Ryul %A Choi, Byoungdeog %T Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application %J Jpn J Appl Phys %0 Journal Article %@ 00214922 %I Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics %D 2011 %8 2011-01-25 %V 50 %N 1 %P 01AB06-01AB06-6 %U http://ci.nii.ac.jp/naid/150000055132/ %R 10.1143/JJAP.50.01AB06