TY - JOUR AU - Lee, Kong-Soo AU - Yeo, Chadong AU - Yoo, Dae-Han AU - Kim, Seok-Sik AU - Moon, Joo-Tae AU - Jung, Soon-Moon AU - Son, Yong-Hoon AU - Park, Hyunho AU - Jeong, Hanwook AU - Kim, Kwang-Ryul AU - Choi, Byoungdeog TI - Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application T2 - Jpn J Appl Phys SN - 00214922 PY - 2011 DA - 2011/01/25 VL - 50 IS - 1 SP - 01AB06-01AB06-6 UR - http://ci.nii.ac.jp/naid/150000055132/ DO - 10.1143/JJAP.50.01AB06 ER -