# Palladium--Hydrogen Complex in Silicon Observed by Electron Spin Resonance Measurement

## Abstract

We have investigated a palladium--hydrogen complex in silicon by electron spin resonance (ESR) measurement. A new ESR spectrum was detected in a sample diffused with palladium and hydrogen. The hyperfine structure of hydrogen atoms in the ESR spectrum shows that the spectrum originates from a palladium--hydrogen complex containing three hydrogen atoms (Pd--H<sub>3</sub>). The anisotropic $g$-value of Pd--H<sub>3</sub>shows that the Pd--H<sub>3</sub>complex has an anisotropic character of orthorhombic ($C_{2v}$) symmetry. The calculated $g$-values of the Pd--H<sub>3</sub>complex are $g_{1} = 2.12$, $g_{2} = 2.10$, and $g_{3} = 2.03$, and the $g_{2}$ axis is along the $\langle 100 \rangle$ direction. The anisotropic character of orthorhombic ($C_{2v}$) symmetry results from a configuration consisting of one Pd atom at a substitutional site, two equivalent hydrogen atoms at interstitial sites along the $\langle 111 \rangle$ direction, and one hydrogen atom at the next-nearest-neighbor interstitial site along the $\langle 100 \rangle$-twofold symmetry axis. We have also studied the dissociation of a platinum--hydrogen complex by thermal treatment. The activation energy for the dissociation of the Pd--H<sub>3</sub>complex is estimated to be about 1.6 eV.

## Journal

Jpn J Appl Phys

Jpn J Appl Phys 50(9), 091301-091301-4, 2011-09-25

The Japan Society of Applied Physics

## Codes

• NII Article ID (NAID) :
150000057878
• NII NACSIS-CAT ID (NCID) :
AA12295836
• Text Lang :
EN
• Journal Type :
大学紀要
• ISSN :
00214922
• NDL Article ID :
11251234
• NDL Source Classification :
ZM35(科学技術--物理学)
• NDL Call No. :
Z53-A375
• Databases :
NDL  JSAP/JPS