Ｆｅ‐Ｓｉ（１１１）合金単結晶膜の作製と磁気特性

• 八重樫 誠司

  （株）ジャパンエナジー材料部品研究所

• 栗原 敏也

  （株）ジャパンエナジー材料部品研究所

• 佐藤 和幸

  （株）ジャパンエナジー材料部品研究所

書誌事項

タイトル別名

• Preparation and Magnetic Properties of (111) Oriented Single-Crystal Films of Fe-Si Alloy.

抄録

(111) oriented single-crystal films of Fe-Si alloy were prepared on Si(111) substrates by dc facing-targets sputtering. Excellent crystalline quality was obtained for film thicknesses from 100 nm to 1.0μm. Soft magnetic property was achieved for a 100 nm-thick Fe-Si(111) film sputtered by using Fe-10%Si targets. In-plane uniaxial magnetic anisotropy was observed in magnetization curves and permeability of a Fe-Si(111) film prepared by using Fe-12%Si targets, with the hard-axis parallel to the magnetic field between two targets (the oblique angle of incidence). Structural asymmetry was not observed in X-ray diffraction measurements. However, the temperature dependence of the anisotropy field shows that the directional order of Fe and Si atoms is not related to the origin of uniaxial anisotropy.

収録刊行物

• 日本応用磁気学会誌

  日本応用磁気学会誌 20 (2), 437-440, 1996

  公益社団法人 日本磁気学会

キーワード

• Fe_1-<i>x</i>Si_<i>x</i>(111) film (<i>x</i>=0.1, 0.12)
• epitaxial growth
• single-crystal
• soft magnetic property
• uniaxial anisotropy
• sputtering
• Si(111) substrate

詳細情報

• CRID: 1390282680070015872
• NII論文ID: 20000346433
• NII書誌ID: AN0031390X
• DOI: 10.3379/jmsjmag.20.437
• COI: 1:CAS:528:DyaK28XivFCgs7k%3D
• ISSN: 18804004
• ISSN: 02850192
• ISSN: http://id.crossref.org/issn/02850192
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可