Reduction and uniformization of the resistivity of Ga-doped ZnO by combining short-gap magnetron sputtering and buffer layer

• Yoshinobu Matsuda

• Naoki Matsuo

• Kohei Sakamoto

• Masanori Shinohara

• Tomohiro Furusato

• Takahiko Yamashita

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 58 (SE), SEED04-, 2019-05-24

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360847874812689536
• NII論文ID: 210000156220
• DOI: 10.7567/1347-4065/ab09c7
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab09c7/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab09c7
• データソース種別:
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