Formation mechanism of ultrathin WSiN barrier layer in a W/WNx/Si system

• K. Nakajima

• Y. Akasaka

• K. Miyano

• M. Takahashi

• S. Suehiro

• K. Suguro

収録刊行物

• Applied Surface Science

  Applied Surface Science 117-118 312-316, 1997-06

  Elsevier BV

キーワード

• Surfaces, Coatings and Films
• Condensed Matter Physics
• Surfaces and Interfaces
• General Physics and Astronomy
• General Chemistry

詳細情報

• CRID: 1360579819443465856
• NII論文ID: 30002964618
• DOI: 10.1016/s0169-4332(97)80100-6
• ISSN: 01694332
• Web Site: https://api.elsevier.com/content/article/PII:S0169433297801006?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0169433297801006?httpAccept=text/plain
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