UV-assisted deposition of TEOS SiO2 films using the spin-coating method

• Koji Kinashi

• Michio Niwano

• Nobuo Miyamoto

• Koji Honma

収録刊行物

• Applied Surface Science

  Applied Surface Science 79-80 332-337, 1994-05

  Elsevier BV

キーワード

• Surfaces, Coatings and Films
• Condensed Matter Physics
• Surfaces and Interfaces
• General Physics and Astronomy
• General Chemistry

詳細情報

• CRID: 1360581244895464832
• NII論文ID: 30002966989
• DOI: 10.1016/0169-4332(94)90432-4
• ISSN: 01694332
• Web Site: https://api.elsevier.com/content/article/PII:0169433294904324?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0169433294904324?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles