Silicide epilayers: recent developments and prospects for a Si-compatible technology

• J. Derrien

• J. Chevrier

• V. Le Thanh

• T.E. Crumbaker

• J.Y. Natoli

• I. Berbezier

収録刊行物

• Applied Surface Science

  Applied Surface Science 70-71 546-558, 1993-06

  Elsevier BV

キーワード

• Surfaces, Coatings and Films
• Condensed Matter Physics
• Surfaces and Interfaces
• General Physics and Astronomy
• General Chemistry

詳細情報

• CRID: 1360855570558317312
• NII論文ID: 30002967411
• DOI: 10.1016/0169-4332(93)90578-y
• ISSN: 01694332
• Web Site: https://api.elsevier.com/content/article/PII:016943329390578Y?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:016943329390578Y?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles