Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

• Paul Brabant

• Jianqing Wen

• Joe Italiano

• Trevan Landin

• Nyles Cody

• Lee Haen

収録刊行物

• Applied Surface Science

  Applied Surface Science 224 (1-4), 347-349, 2004-03

  Elsevier BV

キーワード

• Surfaces, Coatings and Films
• Condensed Matter Physics
• Surfaces and Interfaces
• General Physics and Astronomy
• General Chemistry

詳細情報

• CRID: 1360018294942276224
• NII論文ID: 30002972338
• DOI: 10.1016/j.apsusc.2003.08.105
• ISSN: 01694332
• Web Site: https://api.elsevier.com/content/article/PII:S0169433203011139?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0169433203011139?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles