Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory

• Dominiek Reynaerts

• Paul-Henri's Heeren

• Hendrik Van Brussel

収録刊行物

• Sensors and Actuators A: Physical

  Sensors and Actuators A: Physical 60 (1-3), 212-218, 1997-05

  Elsevier BV

キーワード

• Electrical and Electronic Engineering
• Metals and Alloys
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Instrumentation
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1363107369704602240
• NII論文ID: 30004026201
• DOI: 10.1016/s0924-4247(97)01359-9
• ISSN: 09244247
• Web Site: https://api.elsevier.com/content/article/PII:S0924424797013599?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0924424797013599?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles