Modelization of reaction kinetics of nitrogen and titanium during TiN arc deposition

• Bernard F. Coll

• Manish Chhowalla

収録刊行物

• Surface and Coatings Technology

  Surface and Coatings Technology 68-69 131-140, 1994-12

  Elsevier BV

キーワード

• Materials Chemistry
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Condensed Matter Physics
• General Chemistry

詳細情報

• CRID: 1360861293714463360
• NII論文ID: 30004099486
• DOI: 10.1016/0257-8972(94)90150-3
• ISSN: 02578972
• Web Site: https://api.elsevier.com/content/article/PII:0257897294901503?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0257897294901503?httpAccept=text/plain
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