Vacuum-UV influenced design of polymers and dissolution inhibitors for next generation photolithography

• Brian C. Trinque

• Charles R. Chambers

• Brian P. Osborn

• Ryan P. Callahan

• Geun Su Lee

• Shiro Kusumoto

• Daniel P. Sanders

• Robert H. Grubbs

• Willard E. Conley

• C.Grant Willson

収録刊行物

• Journal of Fluorine Chemistry

  Journal of Fluorine Chemistry 122 (1), 17-26, 2003-07

  Elsevier BV

キーワード

• Inorganic Chemistry
• Organic Chemistry
• Physical and Theoretical Chemistry
• Environmental Chemistry
• Biochemistry

詳細情報

• CRID: 1360581248266155008
• NII論文ID: 30004665346
• DOI: 10.1016/s0022-1139(03)00076-9
• ISSN: 00221139
• Web Site: https://api.elsevier.com/content/article/PII:S0022113903000769?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0022113903000769?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles