From amorphous to microcrystalline silicon films prepared by hydrogen dilution using the VHF (70 MHz) GD technique

• U Kroll

• J Meier

• P Torres

• J Pohl

• A Shah

収録刊行物

• Journal of Non-Crystalline Solids

  Journal of Non-Crystalline Solids 227-230 68-72, 1998-05

  Elsevier BV

キーワード

• Materials Chemistry
• Condensed Matter Physics
• Ceramics and Composites
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1361137046191629952
• NII論文ID: 30004711764
• DOI: 10.1016/s0022-3093(98)00329-9
• ISSN: 00223093
• Web Site: https://api.elsevier.com/content/article/PII:S0022309398003299?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0022309398003299?httpAccept=text/plain
• データソース種別:
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