Dynamic actinometric optical emission spectroscopy for the elucidation of plasma processes in the production of fluorinated amorphous hydrogenated carbon films from glow discharges
収録刊行物
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- Thin Solid Films
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Thin Solid Films 277 (1-2), 115-120, 1996-05
Elsevier BV
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詳細情報
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- CRID
- 1360579819979208320
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- NII論文ID
- 30006180071
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- ISSN
- 00406090
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- データソース種別
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- Crossref
- CiNii Articles