Effects of deposition pressure on structure and hardness of amorphous carbon nitride films synthesized by shielded arc ion plating

• Yusuke Taki

• Nobuhiro Tajima

• Osamu Takai

収録刊行物

• Thin Solid Films

  Thin Solid Films 334 (1-2), 165-172, 1998-12

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360579815959583744
• NII論文ID: 30006180793
• DOI: 10.1016/s0040-6090(98)01137-7
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609098011377?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609098011377?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles