Characterization of amorphous SiC:H films deposited from hexamethyldisilazane

• M.T. Kim

• J. Lee

収録刊行物

• Thin Solid Films

  Thin Solid Films 303 (1-2), 173-179, 1997-07

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1361981470661926656
• NII論文ID: 30006181090
• DOI: 10.1016/s0040-6090(97)00137-5
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609097001375?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609097001375?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles