Composition control of r.f.-sputtered Ti50Ni40Cu10 thin films using optical emission spectroscopy

• S.K Wu

• Y.S Chen

• J.Z Chen

収録刊行物

• Thin Solid Films

  Thin Solid Films 365 (1), 61-66, 2000-04

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1362825893808916096
• NII論文ID: 30006181753
• DOI: 10.1016/s0040-6090(00)00657-x
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S004060900000657X?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S004060900000657X?httpAccept=text/plain
• データソース種別:
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