Control of Y2O3-stabilized ZrO2 thin film orientation by modified bias sputtering

• M. Fukutomi

• S. Aoki

• K. Komori

• Y. Tanaka

• T. Asano

• H. Maeda

収録刊行物

• Thin Solid Films

  Thin Solid Films 239 (1), 123-126, 1994-02

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360581244894775552
• NII論文ID: 30006183149
• DOI: 10.1016/0040-6090(94)90118-x
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:004060909490118X?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:004060909490118X?httpAccept=text/plain
• データソース種別:
  • Crossref
  • CiNii Articles