Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge

• Osamu Matsumoto

• Hiroaki Toshima

• Yasushi Kanzaki

収録刊行物

• Thin Solid Films

  Thin Solid Films 128 (3-4), 341-351, 1985-06

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1363951795191728512
• NII論文ID: 30006190713
• DOI: 10.1016/0040-6090(85)90084-7
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:0040609085900847?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0040609085900847?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles