Depth profiling by GDOES: application of hydrogen and d.c. bias voltage corrections to the analysis of thin oxide films

• J. Michler

• M. Aeberhard

• D. Velten

• S. Winter

• R. Payling

• J. Breme

収録刊行物

• Thin Solid Films

  Thin Solid Films 447-448 278-283, 2004-01

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1361418520195274112
• NII論文ID: 30006197625
• DOI: 10.1016/s0040-6090(03)01105-2
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003011052?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003011052?httpAccept=text/plain
• データソース種別:
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