Low temperature chemical vapor deposition of Co thin films from Co2(CO)8

• D.-X. Ye

• S. Pimanpang

• C. Jezewski

• F. Tang

• J.J. Senkevich

• G.-C. Wang

• T.-M. Lu

収録刊行物

• Thin Solid Films

  Thin Solid Films 485 (1-2), 95-100, 2005-08

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1363951795485002752
• NII論文ID: 30006201250
• DOI: 10.1016/j.tsf.2005.03.046
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609005003615?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609005003615?httpAccept=text/plain
• データソース種別:
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  • CiNii Articles