Tribology of carbon nitride and boron nitride nanoperiod multilayer films and its application to nanoscale processing

• Shojiro Miyake

Journal

• Thin Solid Films

  Thin Solid Films 493 (1-2), 160-169, 2005-12

  Elsevier BV

Keywords

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

Details

• CRID: 1360574095729959168
• NII Article ID: 30006202241
• DOI: 10.1016/j.tsf.2005.07.284
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S004060900501093X?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S004060900501093X?httpAccept=text/plain
• Data Source:
  • Crossref
  • CiNii Articles