Effect of slurry viscosity modification on oxide and tungsten CMP

• G.S. Grover

• H. Liang

• S. Ganeshkumar

• W. Fortino

収録刊行物

• Wear

  Wear 214 (1), 10-13, 1998-01

  Elsevier BV

キーワード

• Materials Chemistry
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Mechanics of Materials
• Condensed Matter Physics

詳細情報

• CRID: 1360581243381888256
• NII論文ID: 30006272481
• DOI: 10.1016/s0043-1648(97)00219-6
• ISSN: 00431648
• Web Site: https://api.elsevier.com/content/article/PII:S0043164897002196?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0043164897002196?httpAccept=text/plain
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