Incorporation of Dust Particles into a Growing Film During Silicon Dioxide Deposition from a TEOS/O₂Plasma

• Manabu Shimada

• Heru Setyawan

• Yutaka Hayashi

• Nobuki Kashihara

• Kikuo Okuyama

• Sugeng Winardi

収録刊行物

• Aerosol Science and Technology

  Aerosol Science and Technology 39 (5), 408-414, 2005-05

  Informa UK Limited

キーワード

• Pollution
• General Materials Science
• Environmental Chemistry

詳細情報

• CRID: 1362262944527941632
• NII論文ID: 30007998726
• DOI: 10.1080/027868290950257
• ISSN: 15217388
• ISSN: 02786826
• Web Site: http://www.tandfonline.com/doi/pdf/10.1080/027868290950257
• データソース種別:
  • Crossref
  • CiNii Articles