Ultraviolet Patterning of Alkoxy‐Derived Lithium Niobate Film

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<jats:p>Patterned lithium niobate (LN) films were synthesized successfully from a precursor film containing 1‐phenyl‐1,3‐butanedione (PBD) by ultraviolet (UV) irradiation. A LN precursor solution composed of lithium ethoxide and niobium ethoxide was modified with PBD in ethanol to form LiNb(OEt)<jats:sub>6‐<jats:italic>n</jats:italic></jats:sub>(PBD)<jats:sub><jats:italic>n</jats:italic></jats:sub>, which was designed to have a specific UV absorption at 330 nm. The precursor film began to crystallize at 400°C on sapphire C substrates. The UV absorption band at 330 nm in the precursor film decreased in intensity with increased exposure time to UV light. The patterned LN films crystallized at 550°C on sapphire C substrates showed a (006) preferred orientation.</jats:p>

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