Pulsed laser deposition of diamond-like carbon films

DOI PDF 被引用文献8件
  • David L. Pappas
    IBM Research, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
  • Katherine L. Saenger
    IBM Research, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
  • John Bruley
    IBM Research, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
  • William Krakow
    IBM Research, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
  • Jerome J. Cuomo
    IBM Research, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
  • Tieer Gu
    Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
  • Robert W. Collins
    Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802

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<jats:p>Carbon thin films have been prepared by 248 nm excimer laser vaporization of graphite targets. The effect of a variety of process parameters on the film properties is investigated. Deposition at or below room temperature yields diamond-like films with low hydrogen content, high optical transmission, and high resistivity. Electron energy loss spectra indicate sp3 bond fractions of 70–85%. Detailed analyses of the pseudodielectric functions, measured using spectroscopic ellipsometry, show the films to have normal dispersion and an index of refraction of 2.5 in the visible wavelength region. The effects of a low pressure hydrogen background and the use of auxiliary pulsed and dc plasma enhancements are also examined.</jats:p>

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