Growth and characterization of (111) and (001) oriented MgO films on (001) GaAs

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  • E. J. Tarsa
    Materials Department, University of California, Santa Barbara, California 93106
  • M. De Graef
    Materials Department, University of California, Santa Barbara, California 93106
  • D. R. Clarke
    Materials Department, University of California, Santa Barbara, California 93106
  • A. C. Gossard
    Materials Department, University of California, Santa Barbara, California 93106
  • J. S. Speck
    Materials Department, University of California, Santa Barbara, California 93106

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Abstract

<jats:p>The effects of substrate preparation on the structure and orientation of MgO films grown on (001) GaAs using pulsed laser deposition has been investigated. Textured MgO films displaying a (111)MgO∥(001)GaAs orientation relation with x-ray rocking curve full width at half maximum (FWHM) values as low as 1.8° were obtained in cases where the native GaAs surface oxide was only partially desorbed prior to growth. Reflection high-energy electron diffraction, transmission electron microscopy (TEM), and x-ray pole figure analysis of these films reveals a preferential orientation within the plane of the substrate: [11̄0]MgO∥[11̄0]GaAs and [112̄]MgO∥[110]GaAs. An interfacial layer (∼5 nm thick) was observed in high resolution TEM analysis, and was attributed to a remnant native GaAs oxide layer. Complete desorption of the native GaAs oxide at ∼600 °C in vacuum prior to MgO growth led to significant surface roughening due to Langmuir evaporation, and resulted in randomly oriented polycrystalline MgO films. Growth of MgO on Sb-passivated GaAs substrates, which provided smooth, reconstructed surfaces when heated to 350 °C in vacuum, resulted in cube-on-cube oriented films [i.e., (001)MgO∥(001)GaAs,[100]MgO∥[100]GaAs] with x-ray rocking curve FWHM values as low as 0.47°. TEM analysis of the cube-on-cube oriented films revealed evidence of localized strain fields at the MgO/GaAs interface, indicating the presence of misfit dislocations in the MgO layer.</jats:p>

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